Measurements and tests in clean rooms
The new guideline VDI 2083 Part 3 describes measurement procedures for cleanrooms and associated areas that are used during handover, as part of the qualification of new facilities, routine control and ongoing monitoring.
The areas of application for cleanrooms are diverse: from semiconductor production to research laboratories to medical applications, there is a need for rooms with controlled cleanliness. The particle concentrations in the air, at the workplace and in the process media must be measured repeatedly to ensure the continued cleanliness of the room. The new directive VDI 2083 Sheet 3 describes measurement procedures for cleanrooms and associated areas that are used during handover, as part of the qualification of new facilities, routine control and ongoing monitoring.
The methods described are specifically designed to meet the requirements of cleanrooms. VDI 2083 Sheet 3 applies to initial and one-off measurements as well as continuous or periodic monitoring. The specified methods are intended for the handover of cleanroom equipment and for the performance of routine and monitoring measurements in accordance with DIN EN 12599, VDI 2083 Part 2 and DIN EN ISO 14644-4 and are intended to replace user-specific procedures. The guideline applies to particles with a size from 100 nm.
Specific information on the measurement procedure
VDI 2083 Sheet 3 contains specific instructions on the measurement procedure, starting with the visual inspection and including methods such as classifications and categorisations. The guideline also provides information on the type and scope of documentation and defines minimum requirements for the measurement report to be prepared.
The VDI 2083 series of guidelines provides all the necessary information on the tasks and measures of cleanroom technology. It is specifically aimed at persons who are responsible for measurement and quality maintenance in cleanrooms. The series provides the necessary data for the selection of methods and parameters and also gives indications for any deviations that may be permissible or necessary.
Publisher of the VDI 2083 part 3 "Clean room technology - – Measurement Technology" is the VDI Gesellschaft Bauen und Gebäudetechnik (GBG). The guideline was published as a draft in August 2021 and can be ordered from Beuth Verlag (Tel.: +49 30 2601-2260). Online orders are available at www.vdi.de/2083 or www.beuth.de possible.
It is possible to help shape the guideline by submitting comments via the electronic objection portal or by sending written notification to the issuing company gbg@vdi.de. The objection period ends on 31 October 2021. The objection period ends on 31.10.2021. VDI guidelines can be viewed free of charge at many public display points.
Press release VDI
Technical contact: Dipl.-Phys. Thomas Wollstein, VDI VDI Society for Construction and Building Technology (GBG), Tel. +49 211 6214-500, E-Mail: gbg@vdi.de
